We present an integrated beam steering system with a microlens scanner and a vertical cavity surface-emitting laser (VCSEL) source. The scanner and the VCSEL are assembled with an alignment sphere process and with an accuracy of 121 ±7 μm defined by precision microspheres. The microlens scanner employs an electrostatic comb-drive actuator with prebent springs to extend the maximum displacement to 83 μm; 60% larger than that with standard folded springs. This translates to an angular scan range of ±9.6° with the double sided comb-drive scanner. The mechanical resonance with lens is measured to be 236 Hz
In the last 2 years, the field of micro-electro-mechanical systems tunable vertical cavity surface-e...
AbstractThis paper presents a design, fabrication and characterization results of an electrostatical...
Micro scanning mirrors are quite versatile MEMS devices for the deflection of a laser beam or a shap...
This paper reports on the design, fabrication and optical characterization of a self-aligned microla...
We present a free-space optical interconnect system capable of dynamic closed-loop optical alignment...
In this work the design and initial fabrication results are reported for the components of a compact...
This paper describes in detail our concept of quasi-static micro scanning mirrors enabling large sta...
Abstract—We have designed, fabricated, and demonstrated large vertical displacement vertical microle...
Abstract. This paper describes a fully integrated micro-optical system, in which dynamic angular con...
This paper presents the optical design of a miniature 3D scanning system, which is fully compatible ...
The authors describe the microfabrication of a multi-level diffractive optical element (DOE) onto a ...
A light and fast two-axial fine-pointing mirror has a number of space applications, especially in in...
We present an 850nm Vertical-Cavity Surface-Emitting Laser (VCSEL) with electrostatically-actuated t...
Abstract—A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuatio...
Three different types of deformable mirror Spatial Light Modulators (SLMs) based on device concepts ...
In the last 2 years, the field of micro-electro-mechanical systems tunable vertical cavity surface-e...
AbstractThis paper presents a design, fabrication and characterization results of an electrostatical...
Micro scanning mirrors are quite versatile MEMS devices for the deflection of a laser beam or a shap...
This paper reports on the design, fabrication and optical characterization of a self-aligned microla...
We present a free-space optical interconnect system capable of dynamic closed-loop optical alignment...
In this work the design and initial fabrication results are reported for the components of a compact...
This paper describes in detail our concept of quasi-static micro scanning mirrors enabling large sta...
Abstract—We have designed, fabricated, and demonstrated large vertical displacement vertical microle...
Abstract. This paper describes a fully integrated micro-optical system, in which dynamic angular con...
This paper presents the optical design of a miniature 3D scanning system, which is fully compatible ...
The authors describe the microfabrication of a multi-level diffractive optical element (DOE) onto a ...
A light and fast two-axial fine-pointing mirror has a number of space applications, especially in in...
We present an 850nm Vertical-Cavity Surface-Emitting Laser (VCSEL) with electrostatically-actuated t...
Abstract—A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuatio...
Three different types of deformable mirror Spatial Light Modulators (SLMs) based on device concepts ...
In the last 2 years, the field of micro-electro-mechanical systems tunable vertical cavity surface-e...
AbstractThis paper presents a design, fabrication and characterization results of an electrostatical...
Micro scanning mirrors are quite versatile MEMS devices for the deflection of a laser beam or a shap...