Pyrolytic and photolytic laser chem. vapor deposition of Cu, Pt, Ga, and Sn was studied for the prodn. of low-resistance ohmic contacts of very small dimensions
A rapid, mask-less deposition technique for the deposition of conductive tracks to nano- and micro-d...
With the further shrink of IC dimension, metallization becomes the most crucial layer because conduc...
The mathematical model that describes adequate the laser-induced process of metal deposition from ga...
The laser chem. vapor deposition of platinum from its bishexafluoroacetylacetonate deriv. is studied...
In this paper, laser chemical vapour deposition (LCVD) is explored as a method for the deposition of...
[[abstract]]The overall objective of this program was to investigate laser-activated chemistry for f...
The object of investigation: the elements of optical and electronic systems (protective, lightening ...
The Westinghouse Electric Corporation has undertaken to investigate, develop, and characterize laser...
Abstract The demands toward the development of simple and cost-effective fabrication methods of meta...
We report on the use of a novel organometallic precursor for laser-directed chemical vapor depositio...
The structure shrink of IC dimensions leads to a demand of improved metallization layers because con...
Laser-assisted metalorganic chemical vapor deposition (MOCVD) was used to grow crystalline zinc sulf...
Pyrolytic laser-induced chemical vapour deposition is a technique that achieves rapid (volumetric de...
nformation about the factors influencing laser-induced deposition of metals, primarily copper, from ...
A laser offers a unique set of opportunities for precise delivery of high quality coherent energy. T...
A rapid, mask-less deposition technique for the deposition of conductive tracks to nano- and micro-d...
With the further shrink of IC dimension, metallization becomes the most crucial layer because conduc...
The mathematical model that describes adequate the laser-induced process of metal deposition from ga...
The laser chem. vapor deposition of platinum from its bishexafluoroacetylacetonate deriv. is studied...
In this paper, laser chemical vapour deposition (LCVD) is explored as a method for the deposition of...
[[abstract]]The overall objective of this program was to investigate laser-activated chemistry for f...
The object of investigation: the elements of optical and electronic systems (protective, lightening ...
The Westinghouse Electric Corporation has undertaken to investigate, develop, and characterize laser...
Abstract The demands toward the development of simple and cost-effective fabrication methods of meta...
We report on the use of a novel organometallic precursor for laser-directed chemical vapor depositio...
The structure shrink of IC dimensions leads to a demand of improved metallization layers because con...
Laser-assisted metalorganic chemical vapor deposition (MOCVD) was used to grow crystalline zinc sulf...
Pyrolytic laser-induced chemical vapour deposition is a technique that achieves rapid (volumetric de...
nformation about the factors influencing laser-induced deposition of metals, primarily copper, from ...
A laser offers a unique set of opportunities for precise delivery of high quality coherent energy. T...
A rapid, mask-less deposition technique for the deposition of conductive tracks to nano- and micro-d...
With the further shrink of IC dimension, metallization becomes the most crucial layer because conduc...
The mathematical model that describes adequate the laser-induced process of metal deposition from ga...
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