The development and application of imaging EXAFS spectromicroscopy
- Hwu, Y.
- Tsai, W. L.
- Chang, L. W.
- Chen, C. H.
- Wu, C. C.
- Noh, D. Y.
- Je, J. H.
- Fecher, G. H.
- Bertolo, M.
- Berger, H.
- Margaritondo, G.
DOIAbstract
The capability to perform absorption spectroscopy with hard x-rays was added to the synchrotron imaging spectromicroscopy technique. We present several successful test cases. First, the EXAFS (extended x-ray absorption fine structure) analysis was implemented in areas as small as few mu m(2) for transition-metal K edge absorption spectra. The corresponding structural information was complemented by chemical information from the near-edge region. Specifically, in the case of a cross-sectional cut steel different Fe oxidation states were found at different depths. Tests on a PVD grown TiN film revealed areas with oxidized Ti. Overall, these tests demonstrate the feasibility of combining structural and chemicals analysis with hard x ray absorp...
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