Design of diffractive optical elements for CO2-laser material processing

In this paper we report on the design of diffractive optical elements (DOEs) for high power laser radiation. We modified the Fourier transform algorithm, which allows hologram calculation also for reflective type Kinoforms considering the tilted arrangement. To achieve light weighted DOEs which are resistend against intense laser radiation reflective DOEs in silicon were fabricated. The elements have been investigated with respect to the diffraction efficiency and the absorption values