Novel Microsystem Techniques for Liquid Manipulation and Pressure Sensing

Scaling down operations and functions into the fascinating micro world not only improve performance, lower costs, and enable easier integration, but also opens the door to new functionalities. This truly multidisciplinary thesis presents novel solutions to current and relevant challenges in the areas of 1) on-chip liquid manipulation which has applications in micro total analysis systems, medical diagnostics, and drug discovery and 2) pressure sensing which has an established market in the automotive and industrial processes industry. Especially in the area of liquid manipulation, the aim was to take advantage of forces and properties dominating on the micro scale whenever possible, rather than compensating for these effects, and to create solutions with universal appeal and application areas. In the area of liquid manipulation, this thesis discusses a novel method of passively synchronizing liquid movement on-chip based on liquid surface tension and device geometry. This technique has potential applications in timing independent processes, liquid-liquid interactions, and digitizing liquid movement. A fast and passive discrete sample micromixer is also presented based on the same principles. A unique way of direct access, bubble tolerant sample interfacing with flow-through microfluidics using a closed-open-closed channel is also introduced. This method can be used to regulate flow on-chip without the need for any moving parts or electrical contact. Moreover, work is presented on two types of out-of-plane electrospray ionization mass spectrometry (ESI-MS) emitter tips which mimic ideal mass spectrometry tips. Fabrication of these tips is uncomplicated and results in robust structures with good performance. In the field of pressure sensing, this thesis investigates a form based resonating principle. The Q factor of the sensor is improved by low pressure encapsulation and structure design. A novel technique for excitation and detection of resonant microsensors using 'burst' technology is also demonstrated. This method involves temporally separating excitation and detection, thereby eliminating crosstalk and the need for electrical feedthroughs. It also allows high voltages to be used with sensitive circuitry and a single electrode to be used for both excitation and detection