Evidence for a Cr metastable phase as a tracer in DLI-MOCVD chromium hard coatings usable in high temperature environment
- Michau, Alexandre
- Maury, Francis
- Schuster, Frederic
- Boichot, Raphael
- Pons, Michel
DOIAbstract
International audienceCr deposits are widely used as protective coatings but multifunctional performances are required in harsh environments motivating research on new processes. MOCVD of Cr metal coatings was carried out by direct liquid injection (DLI) of a unique solution containing bis(ethylbenzene)chromium as metal source and thiophenol as inhibitor of carbide formation. A low amount (<6%) of the metastable δ-Cr phase was found embedded in the stable α-Cr phase. The formation of this metastable phase originates from both the low deposition temperature (<723 K) and the use of thiophenol. It was not reported under other CVD conditions. Dense coatings were deposited by implementing a multilayer growth mode. Such coatings exhibit a high na...
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