Residual stress and buckling patterns of yttria-stabilised-zirconia thin films for micro-solid oxide fuel cell membranes

Free-standing yttria-stabilised-zirconia (YSZ) thin films can be found in today's miniaturised gas sensors and as electrolytes in micro-solid oxide fuel cell membranes. 8 mol.% YSZ thin films prepared by pulsed laser deposition on silicon substrates are investigated by wafer curvature and nanoindentation. The 300nm thin 8YSZ films deposited at 700°C have a compressive stress of -1100±150 MPa and a Young's modulus of 205±20 GPa at 25 °C. The corresponding free-standing 8YSZ membranes are investigated by light microscopy and white light interferometry. The 8YSZ membranes deposited at 700°C have a buckling shape with a C4z-rotational symmetry and buckling amplitude of 6.5μm at 25°C. Numerical simulations of the buckling patterns using the Rayleigh-Ritz-method are in good agreement with the experimental data. These simulated buckling patterns are used to extract the local stress distribution. This is important regarding the application of YSZ membranes in micro-solid oxide fuel cells which must be thermomechanically-stable during device operation