A list of nanomaterials that are of strategic importance for the semiconductor sector in the future

The NanoStreeM project collects and summarizes data on nanomaterials that come or may come of interest in future manufacturing of semiconductor devices and circuits. The layout and results of a systematic literature survey are described in the present document. The structured approach starts with the definition of the goals and definition of the research field followed by a delineation against areas that are beyond the scope of the task. In detail, only fabrication processes related to the manufacture or post-processing of silicon integrated circuits are under investigation. Although this field has been adressed by other authors, a thorough study is not existent. After discussing the applicability of available sources, a two-stage strategy is developed for retrieving relevant data. As groundwork, the chapters on Emerging Research Devices and Emerging Research Materials of the meanwhile discontinued International Technology Roadmap for Semiconductors (2011 version) were used for the retrieval of keywords and the subsequent elaboration of search phrases for an extended literature search on a standard repository. A total of 58 keyword families with numerous variation possibilities were identified. As a compendium offering a thorough overview on the history and future of silicon based devices and respective manufacturing, the proceedings of the IEEE International Electron Devices Meeting (IEDM) from 1954 up to now were chosen. It is assumed that all relevant developments regarding Si related device concepts and processing should have been presented at this conference. Based on this survey, a total of 1080 articles (as of spring 2017) were identified that contain information on the application of nanomaterials in front-end silicon integrated circuit manufacturing. These instances were gathered in a literature database and categorized for further evaluation