Highly efficient reflective Dammann grating with a triangular structure

National Natural Science Foundation of China (NSFC) [61307064, 61405214]; Ministry of Science and Technology of the People's Republic of China (MOST) [2012YQ170004]A highly efficient reflective Dammann grating with a triangular structure operating at 1064 nm wavelength under normal incidence for TE polarization is designed and fabricated. Rigorous coupled wave analysis and particle swarm optimization algorithms are adopted to design and analyze the properties. The triangular reflective grating could cancel the 0th order, and the mechanism is clarified by the simplified modal method. The gratings are fabricated by direct laser writing lithography. The diffraction efficiency of fabricated grating is more than 86% at 1064 nm wavelength (97.6% in theory). This reflective grating should be a useful optical element in the field of high-power lasers as well as other reflective applications. (C) 2016 Optical Society of Americ