A Spot Tracking System Design for Scanning-Probe Atomic Force Microscope

纳米科技是现代科学和现代技术相结合的产物，它的兴起对现代科学技术的发展起到至关重要的影响作用。以扫描隧道显微镜(STM)和原子力显微镜(AFM)为代表的扫描探针显微镜不仅可作为纳米级别的表面测量分析仪器，而且也是纳米技术中必不可少的加工工具。尤其是原子力显微镜，它可以在真空、大气、液体的环境下，对导体和非导体的各种样品进行测试，因而具有更广泛的应用领域。 由于样品扫描式原子力显微镜能够测量的样品尺寸和重量受到限制，针尖扫描式原子力显微镜的研究和应用受到广泛重视。本文提出了一种新型针尖扫描式原子力显微镜的光点跟踪系统的设计方案，并对方案进行了实验论证；另外，本论文还讨论了一种生物荧光成像仪的研制过程。 论文首先简要介绍了纳米技术，包括纳米技术的产生和发展、研究和应用、前景和我国纳米技术的现状。接着介绍了扫描探针显微镜家族，重点介绍了扫描隧道显微镜（STM）和原子力显微镜（AFM）。 论文对原子力显微镜涉及的基础理论作了详细介绍，包括：与AFM有关的力，原子力曲线，微悬臂的制备和型变的检测，AFM的工作模式和成像模式。 本论文研究的重点是设计一种新型的针尖扫描式AFM的光点跟踪系统。论文先对已有的设计方案做了介绍，并进而提出自己的方案。对方案设计的关键点作了详细论述，包括：微悬臂形变检测光路的设计，小孔光阑尺寸的确定，xy扫描器和z扫描器，粗调与微调，隔振与屏蔽。 论文对生物荧光成像仪的讨论可分为两个方面，一是对荧光标示技术作了简要介绍，二是详细论述了该生物荧光成像仪的研制过程，并利用该装置对FITC荧光染料做了性能测试，结果表明，系统具有良好的成像性能。Nano science and technology derived form the modern science and technology, its rise has impacted on the modern science and technology’s developing. The scanning probe microscope (STM and AFM, for example) not only impels the development of nano-technology, but also is the indispensable tool in research of nano-technology today. In particular, atomic force microscope (AFM) can test conductor or insulator samples in wide ambient such as vacuum, air or liquids, so AFM has a broader application. The sample, which can be tested by scanning-sample AFM, its size and weight is restricted by the size and resonance frequency of the tube piezoelectric ceramic scanners. So people pay much attention to scanning-probe AFM’s developing. This thesis puts forward a design method about scanning-probe AFM’s laser spot tracking system. Besides, we have demonstrated the design by the experiments. The thesis gives a brief introduction of nano-technology, including the emergence of nanotechnology and development, research and application, prospects and the status quo of China''s nano-technology. Then the thesis introduced the family of scanning probe microscope, focusing on the scanning tunneling microscope (STM) and atomic force microscope (AFM). The thesis introduced the theory of AFM in detail, including: the atomic force about AFM, the curve of the atomic force, the preparation and detection of micro-cantilever, the imaging mode and the working mode of AFM. The focus of the study is to design a new type of the optical tracking system of the scanning-probe AFM .The thesis has discussed the key points in detail, including: the optical detection path design of micro-cantilever deformation, the determination of small aperture’s size, xy scanner and z scanner, coarse-tuning and fine-tuning, vibration isolation and shielding. The discussion of biological fluorescence imaging device can be divided into two aspects. First, the fluorescent marker technology are briefly introduced. Second, the biological fluorescence imaging device development process is discussed in detail. With the FITC fluorescent dyes the device has done performance tests. Results show that the imaging system has good performance