Insight into the degradation mechanism resisting the laser-induced damage of optical films in vacuum by evolution of laser-induced defects

The degradation mechanism resisting the laser-induced damage of optical thin films in a vacuum may be understood by the evolution of laser-induced defects. The accumulation of these newly created defects with irradiated shot numbers results in the severe fatigue effects of multiple-pulse laser damage in the vacuum. The correlative theory was used to further explain this degradation mechanism of multi-pulse irradiation in a vacuum