This abstract presents the development of an Atomic Force Microscope (AFM) vertical scanner for surface topography measurements, which is composed of a single axis positioning stage with an integrated metrology system and AFM probe. The scanner is meant to track and measure a maximum topography step of 10 ?m with a measurement resolution of less then 0.1 nm and an uncertainty of less than 10 nm (1←) at a controllable bandwidth of at least 2 kHz.Precision and Microsystems EngineeringMechanical, Maritime and Materials Engineerin
This project designed AFM probe tips to minimise errors, along with methods of micromachining them.M...
The last century was characterized by the extreme developing of the technology, being an essential p...
The essence of the work presented here is the introduction, the advance in theoretical understanding...
This thesis describes the design, fabrication, and testing of a metrological atomic force microscope...
Advances in the electronics sector, medicine and material sciences have increased the need for inspe...
A compact vertical scanner for an atomic force microscope (AFM) is developed. The vertical scanner i...
A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and disc...
A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and disc...
The design of a large measurement-volume metrological atomic force microscope (AFM) is presented. Th...
This Ph.D. project is aimed at developing and validating techniques for successful use of Atomic For...
A single PZT (piezoelectric) tube is generally used in atomic force microscope (AFM) as its scanner....
One of the major limitations in the speed of the atomic force microscope (AFM) is the bandwidth of t...
The atomic force microscope (AFM) is designed to provide high-resolution (in the ideal case, atomic)...
An Atomic Force Microscope (AFM) is an important tool in modern nanoscience. The AFM is capable of p...
International audienceA family of silicon micro-sensors for Atomic Force Microscope (AFM) is present...
This project designed AFM probe tips to minimise errors, along with methods of micromachining them.M...
The last century was characterized by the extreme developing of the technology, being an essential p...
The essence of the work presented here is the introduction, the advance in theoretical understanding...
This thesis describes the design, fabrication, and testing of a metrological atomic force microscope...
Advances in the electronics sector, medicine and material sciences have increased the need for inspe...
A compact vertical scanner for an atomic force microscope (AFM) is developed. The vertical scanner i...
A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and disc...
A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and disc...
The design of a large measurement-volume metrological atomic force microscope (AFM) is presented. Th...
This Ph.D. project is aimed at developing and validating techniques for successful use of Atomic For...
A single PZT (piezoelectric) tube is generally used in atomic force microscope (AFM) as its scanner....
One of the major limitations in the speed of the atomic force microscope (AFM) is the bandwidth of t...
The atomic force microscope (AFM) is designed to provide high-resolution (in the ideal case, atomic)...
An Atomic Force Microscope (AFM) is an important tool in modern nanoscience. The AFM is capable of p...
International audienceA family of silicon micro-sensors for Atomic Force Microscope (AFM) is present...
This project designed AFM probe tips to minimise errors, along with methods of micromachining them.M...
The last century was characterized by the extreme developing of the technology, being an essential p...
The essence of the work presented here is the introduction, the advance in theoretical understanding...