RELIABILITY ACCELERATED TESTING OF MEMS ACCCELEROMETERS
- Bazu, Marius
- Gălăţeanu, Lucian
- Ilian, Virgil Emil
- Loicq, Jerôme
- Habraken, Serge
- Collette, Jean-Paul
Publication date
January 2007
DOI Publisher
Institute of Electrical and Electronics Engineers (IEEE) ISSN
1545-827XAbstract
An attempt to assess the reliability of a batch of MEMS accelerometers is presented. The testing plan is application oriented and contains combined tests: thermal and mechanical stresses (two variants: vibration and tilting) were used. The results demonstrated the good reliability of the tested device, the failure rate being smaller than 6.10-8h-1
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