[[alternative]]DEVELPMENT OF MEMS-BASED MICROREACTOR FABRICATED FOR SYNTHESIZING COMPOSITE CdSe NANOPARTICLES

[[abstract]]Nanoparticles have been widely used in the fields of opto-electric and bio-inspecting technologies. The opto-electric characteristics of materials, e.g. absorbed and emitting spectrum, are significantly dependent to the size of the particles; therefore, the related techniques for preparing nanoparticle are requested to high monodispersity and controllability of particle diameters recently. However, the monodispersity of particle diameters is still a problem in present preparing techniques of nanoparticles. Microfluidic system has the advantage of rapid mass transport and heat delivery. In this proposal, a MEMS-based microreactor chip will be developed to synthesize composite CdSe nanoparticles. This microreactor chip will integrate the functions of micro mixer, micro heater, continuous reaction. Compared with the traditional reactor, because microreactor has the merits of rapidly increasing and decreasing temperature, uniform temperature distribution, concentration and react time easily controlled, can significantly improve the drawbacks of poor monodispersity of particle diameters. Besides, the particle diameters can be precisely controlled by adjusting reaction parameters; batch production of nanoparticles will be also realized by continuous reaction and synthesis. We developed a glass deep-etching technique and integrated Pt micro heater and 3D micromixer on micro reactor devices. By using this device, CdSe nanoparticles can be produced and particle size can be adjusted by the temperature control.