Electrostatic coupling of MEMS structures: transient simulations and dynamic pull-in

In micro-electromechanical systems (MEMS), coupling of structures through electrostatic forces is a primordial phenomenon. Simulating the dynamics of MEMS and taking into account such strong coupling effects allows one to predict dynamical performance and stability, and is therefore an essential issue in the design of highly effective and reliable devices. Analysis techniques for such systems require special attention in order to provide to the designer accurate and fast tools.We propose a finite element approach (FEM) that properly handles the strong electromechanical coupling in MEMS. In the simulation example of a micro-bridge, we show that such simulation techniques can reveal complex dynamical behaviors of MEMS such as dynamic pull-in