On nanopositioning control of a cantilever with electrostatic actuation and tunneling current sensing based on multi-mode modelling

International audienceConsidering a cantilever motion subject to electrostatic actuation and tunnelingcurrent sensing, a multi-mode model is first analyzed, with an emphasis on the effect ofactuator/sensor location. In particular, it is underlined how specific locations can result ina model of reduced order, making in turn a related control design more simple. This is thenillustrated by a robust control scheme aiming at positioning the cantilever. This control inparticular handles the effect of proximity forces, and the results are illustrated in simulatio