On-chip dynamic mode atomic force microscopy: a silicon-on-insulator MEMS approach

The atomic force microscope (AFM) is an invaluable scientific tool; however, its conventional implementation as a relatively costly macroscale system is a barrier to its more widespread use. A microelectromechanical systems (MEMS) approach to AFM design has the potential to significantly reduce the cost and complexity of the AFM, expanding its utility beyond current applications. This paper presents an on-chip AFM based on a silicon-on-insulator MEMS fabrication process. The device features integrated xy electrostatic actuators and electrothermal sensors as well as an AlN piezoelectric layer for out-of-plane actuation and integrated deflection sensing of a microcantilever. The three-degree-of-freedom design allows the probe scanner to obtain topographic tapping-mode AFM images with an imaging range of up to 8μm × 8μm in closed loop