Near edge x-ray absorption fine structure spectroscopy study of atomic nitrogen implanted in Al2O3 by low energy N2+ bombardment
- Barranco Quero, Ángel
- Holgado Vázquez, Juan Pedro
- Yubero Valencia, Francisco
- Espinós Manzorro, Juan Pedro
- Martín, Ana I.
- Rodríguez González-Elipe, Agustín
Publication date
May 2001
DOI Publisher
American Vacuum Society ISSN
0734-2101 Language
English Citation count (estimate)
2Abstract
N2+ bombardment of Al2O3 has been investigated by near edge x-ray absorption fine structure spectroscopy. Two kinds of species were detected and were attributed to implanted nitrogen atoms and nitride species. These results are discussed in relation to previous attributions in the literature of these species to AlNO and AlN.Comisión Interministerial de Ciencia y Tecnología (CICYT) MAT97-068
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