Fabrication of nanostructures for photonic applications

International audienceThe goal of this poster presentation is to give an overview of nanofabrication technics commonly used for realization of nanostructures in our micro and nanofabrication facilities. We focus on process equipment available in the CINaM clean room. We will also discuss some new scientific results obtained on plasmonics nanoarrays for molecular sensing and on silicon structures showing Mie scattering resonances in the visible and near infrared spectral regions. All nanostructures were obtained in our clean room facilities using nanofabrication tools such as electron beam lithography, magnetron sputtering or thermal evaporation and chemical or reactive ion etching