In situ observation of ultrafast laser induced micro nano structures using structured light illumination

International audienceUltrafast laser pulses can be used to achieve structuring of surfaces at the micro-nano scale. Under certain irradiation conditions, Laser Induced Periodic Surface Structures (LIPSS) are formed. The LIPSS dimensions range from 100 nm to 2-3 micrometers. The characterization is generally conducted after the laser irradiation by systems such as SEM and/or AFM with a resolution beyond the diffraction limit. In this paper, we use a super resolution microscopy technique based on structured illumination for in-situ observation of the irradiated surface. The LIPSS formation on steel and Si is observed IN-SITU and discussed for a multipulse sequence