Development of a novel 3-DOF suspension mechanism for multi-function stylus profiling systems

This paper proposes a novel 3-DOF suspension mechanism for multi-function stylus profiling systems. Incorporating an electromagnetic force actuator, the 3-DOF suspension mechanism provides a controlled loading force. For reasons of the thermal and mechanical stability, a triangular flexure structure is utilized to support the stylus. The stiffness matrix method is used to establish the analytical stiffness model of the 3-DOF suspension mechanism. Considering the 3-DOF suspension mechanism as a 3-DOF lumped-mass-spring system, the dynamic model is established. Finite element analysis (FEA) is used to validate the established static and dynamic models of the 3-DOF suspension mechanism. A prototype is fabricated and experimental tests are carried out to characterize the mechanism’s performance. The results show that the 3-DOF suspension mechanism provides a controlled force in a range of up to 10 mN and has a working range in excess of 10 μm with a first natural frequency of 342 Hz in Z axis, indicating good capability for multi-function measurements at the micro/nano scale