Gedünnte kapazitive Silizium-Drucksensoren in flexiblen und dehnbaren extra weichen Substraten für haptische Messungen: Untersuchungen zur Kompensation der Biegeabhängigkeit des Sensor-Output-Signals

This paper introduces a study on flexible and stretchable sensor arrays as an add-on for tactile sensing for robotics or prosthetics. The aim of such a sensor array is the detection of tactile sensations with high resolution. This array consists of thinned and thereby flexible silicon pressure sensors embedded in an extra soft silicone substrate. They are connected with conductors whose shape allows stretching by more than 80 % without series faults. The output signal of thinned capacitive pressure sensors shows a dependence on bending of the sensor chips. To minimize these dependency two pressure sensors were mounted back to back and their individual dependencies were used for compensation by numerical methods