Nano-Cones Formation on a Surface of Si1-xGex Layers by Laser Radiation

The study of self-assembling nano-cones induced by irradiation of nanosecond Nd:YAG laser pulses on a surface of a Si1-xGex solid solution is reported. It is shown that dynamics of nano-cones formation depends on concentration of Ge atoms (x) in Si lattice and on the intensity of laser radiation (LR). Two different processes of nano-cones formation depending on x are observed. The first one - at higher concentration of Ge atoms x = 0.3-0.4 and the second one - at lower concentration of Ge atoms at x=0.15 take place. At the first stage, similar processes of nano-cones formation occur. It means, at low intensity of LR I<2.0MW/cm2 Ge atoms drift to the irradiated surface due to thermo-gradient effect [1] and Ge-rich phase is formed for both concentration ranges. The second stage is different for low and high Ge content ranges. At the higher concentration of Ge atoms and intensity of LR I>2.0 MW/cm2 nano-cones formation takes place by Stransky- Krastanov mode. On the contrary, at lower concentration of Ge atoms cones look like “tree ring” [2] growth due to melting of Ge separated islands on the irradiated surface at intensity of LR I=20 MW/cm2