Tungsten-containing diamondlike carbon (W-DLC) coatings have been deposited on FKM (fluorocarbon), ACM (acrylate), and HNBR (hydrogenated nitrile butadiene) rubbers via unbalanced magnetron reactive sputtering from a WC target in C2H2/Ar plasma. The surface morphology and fracture cross sections of coated rubbers have been scrutinized by high resolution scanning electron microscopy (SEM). The random crack networks formed due to the large difference in the coefficients of thermal expansion break down the W-DLC coatings into segments of a couple of hundred micrometers in size, facilitating good flexibility if the interfacial adhesion between the coating and a rubber substrate is strong enough. The size and density of growth defects in the W-D...