Fabrication of photonic crystals on several kinds of semiconductor materials by using focused-ion beam method
- Xu XS (Xu Xingsheng)
- Chen HD (Chen Hongda)
- Xiong ZG (Xiong Zhigang)
- Jin AZ (Jin Aizi)
- Gu CZ (Gu Changzhi)
- Cheng BY (Cheng Bingying)
- Zhang DZ (Zhang Daozhong)
- Xu, XS, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China. 电子邮箱地址: xsxu@red.semi.ac.cn
DOIAbstract
In this paper, we introduced the fabrication of photonic crystals on several kinds of semiconductor materials by using focused-ion beam machine, it shows that the method of focused-ion beam can fabricate two-dimensional photonic crystal and photonic crystal device efficiently, and the quality of the fabricated photonic crystal is high. Using the focused-ion beam method, we fabricate photonic crystal wavelength division multiplexer, and its characteristics are analyzed. (c) 2007 Elsevier B.V. All rights reserved