High performance metal-insulator-metal capacitor using a SrTiO(3)/ZrO(2) bilayer

International audienceFuture integration of metal-insulator-metal capacitors requires devices with high capacitance density and low quadratic voltage coefficient of capacitance . A major problem is that the increase in capacitance density is usually accompanied by increased voltage nonlinearities. By combining two high-k materials with opposite , it is demonstrated that it is possible to obtain capacitors with both high capacitance density and minimal nonlinearity. A SrTiO3 /ZrO2 bilayer was used to elaborate capacitors displaying a voltage coefficient of −60 ppm/V2 associated with a density of 11.5 fF/ m2. These devices constitute excellent candidates for the next generation of metal-insulator-metal capacitors