The concept of the micro-structured vacuum sensor presented in this article is the measurement of the electrical conductivity of thinned gases in order to develop a small, economical and quite a simple type of vacuum sensor. There are already some approaches for small vacuum sensors. Most of them are based on conservative measurement principles similar to those used in macroscopic vacuum gauges. Ionization gauges use additional sources of energy, like hot cathodes, ultraviolet radiation or high voltage for example, for ionizing gas molecules and thereby increasing the number of charge carriers for measuring low pressures. In contrast, the concept discussed here cannot be found in macroscopic sensor systems because it depends on the...
Porous polycrystalline silicon (PPS) based conductivity sensors were fabricated and characterized in...
This paper reports on the design, fabrication, and characterization of device-level vacuum-packaged ...
Beyond conventional temperature, humidity, pressure and acceleration sensors, low-power gas sensing ...
A novel concept of vacuum pressure sensor based on thin film technology is presented. The sensor i...
AbstractThe paper presents a MEMS-type vacuum and residual gas composition sensor, which in contrast...
This thesis reports how prototypes of micromachined vacuum sensors were designed, fabricated and cha...
In this research a state-of-the-art micro-thermal conductivity detector is developed based on MEMS t...
A novel microstructure pressure sensor for robot tactile sensing is currently under development. The...
Gas sensing performance characterization systems are essential for the research and development of g...
International audienceThis paper describes a thin-film sensor, a measuring method that gives it bett...
International audienceIn both the literature and industry, there are various examples of gas detecti...
This paper proposes a novel wafer-level vacuum packaged electric field microsensor (EFM) featuring a...
In a technological world that is trending towards smart and autonomous engineering, the collection o...
Realization of intelligent thermal vacuum sensors based on multipurpose thermopile micro-electromech...
The dissertation thesis is focused on research and development of modern emission MEMS sensors. The ...
Porous polycrystalline silicon (PPS) based conductivity sensors were fabricated and characterized in...
This paper reports on the design, fabrication, and characterization of device-level vacuum-packaged ...
Beyond conventional temperature, humidity, pressure and acceleration sensors, low-power gas sensing ...
A novel concept of vacuum pressure sensor based on thin film technology is presented. The sensor i...
AbstractThe paper presents a MEMS-type vacuum and residual gas composition sensor, which in contrast...
This thesis reports how prototypes of micromachined vacuum sensors were designed, fabricated and cha...
In this research a state-of-the-art micro-thermal conductivity detector is developed based on MEMS t...
A novel microstructure pressure sensor for robot tactile sensing is currently under development. The...
Gas sensing performance characterization systems are essential for the research and development of g...
International audienceThis paper describes a thin-film sensor, a measuring method that gives it bett...
International audienceIn both the literature and industry, there are various examples of gas detecti...
This paper proposes a novel wafer-level vacuum packaged electric field microsensor (EFM) featuring a...
In a technological world that is trending towards smart and autonomous engineering, the collection o...
Realization of intelligent thermal vacuum sensors based on multipurpose thermopile micro-electromech...
The dissertation thesis is focused on research and development of modern emission MEMS sensors. The ...
Porous polycrystalline silicon (PPS) based conductivity sensors were fabricated and characterized in...
This paper reports on the design, fabrication, and characterization of device-level vacuum-packaged ...
Beyond conventional temperature, humidity, pressure and acceleration sensors, low-power gas sensing ...