Design, Fabrication, Assembly and Characterization of a SWNT Switch for Non-volatile Memory Applications

A SWNT based non-volatile nano-electromechanical bi-stable switch for memory applications is proposed and fabricated. Conventional E-beam lithography and microfabrication methods are used to fabricate the switch while modified electric field assisted directed assembly process is used to assemble the SWNTs on to these fabricated structures. In this bi-stable switch the actuation of states are achieved at the same voltage when compared to several other SWNT electromechanical devices. Further modifications to the existing design would result in Latches, Flip-Flops, registers, etc which are the back bones of a computer processor chip. These devices can also be incorporated with existing CMOS process to fabricate other volatile memory devices