Thermal and mechanical analysis of a microreactor for high-temperature catalytic gas phase reactions

In this contribution we describe the results of a study into the thermal and thermo-mechanical behavior of a high temperature micro gas reactor for investigation of the intrinsic reaction kinetics of rhodium-catalyzed direct catalytic partial oxidation (CPO) of methane into synthesis gas. The chip comprises a flow channel etched in silicon, capped with a thin composite membrane of heavily boron-doped silicon (p++-Si) and low stress silicon-rich nitride (SiRN), on which thin film heaters and sensors are located. The results of analytical and numerical models, which are verified with experimental results, can be used as general guidelines for the design of membrane-based microreactors