Important problems in load cells are creep and hysteresis. Expensive high grade steels are used in order to reduce these effects. In this paper a silicon load cell design is presented which is based on a force-to-liquid-pressure transformation. The design is insensitive to hysteresis and creep, can be made at very low costs and is able to measure loads up to 1000 kg with an accuracy of 0.03 %. Analytical, numerical and experimental results on a macroscopic steel load cell are in very close agreement with each other
Abstract- In this paper, a micromachined silicon load cell (force sensor) is presented for measuring...
In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up ...
Manipulation at the sub-micron scale often requires force-sensing capabilities of milli-to nanonewto...
Important problems in load cells are creep and hysteresis. Expensive high grade steels are used in o...
Important problems in load cells are creep and hysteresis. Expensive high grade steels are used in o...
In this paper, a low-cost load cell (force sensor) is presented in which the force to be measured is...
In this paper, the first silicon load cell is presented designed for measuring a load up to 1000 kg....
In this paper, a bulk micromachined silicon load cell is presented, designed for loads up to 1000 kg...
To minimize hysteresis and creep for load cells which are force sensors, expensive materials and fab...
The aim of the research presented in this thesis is to improve the performance of high capacity conv...
A silicon load cell (force sensor) is presented which is based on a new operating principle. The for...
A silicon load cell (force sensor) that is based on a new operating principle is presented. The forc...
In this paper, a bulk micromachined silicon load cell is presented, designed for loads up to 1000 kg...
n this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up t...
Abstract- In this paper, a micromachined silicon load cell (force sensor) is presented for measuring...
Abstract- In this paper, a micromachined silicon load cell (force sensor) is presented for measuring...
In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up ...
Manipulation at the sub-micron scale often requires force-sensing capabilities of milli-to nanonewto...
Important problems in load cells are creep and hysteresis. Expensive high grade steels are used in o...
Important problems in load cells are creep and hysteresis. Expensive high grade steels are used in o...
In this paper, a low-cost load cell (force sensor) is presented in which the force to be measured is...
In this paper, the first silicon load cell is presented designed for measuring a load up to 1000 kg....
In this paper, a bulk micromachined silicon load cell is presented, designed for loads up to 1000 kg...
To minimize hysteresis and creep for load cells which are force sensors, expensive materials and fab...
The aim of the research presented in this thesis is to improve the performance of high capacity conv...
A silicon load cell (force sensor) is presented which is based on a new operating principle. The for...
A silicon load cell (force sensor) that is based on a new operating principle is presented. The forc...
In this paper, a bulk micromachined silicon load cell is presented, designed for loads up to 1000 kg...
n this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up t...
Abstract- In this paper, a micromachined silicon load cell (force sensor) is presented for measuring...
Abstract- In this paper, a micromachined silicon load cell (force sensor) is presented for measuring...
In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up ...
Manipulation at the sub-micron scale often requires force-sensing capabilities of milli-to nanonewto...