A thermopneumatic micropump based on micro-engineering techniques

The design, working principle and realization of an electro-thermopneumatic liquid pump based on micro-engineering techniques are described. The pump, which is of the reciprocating displacement type, comprises a pump chamber, a thin silicon pump membrane and two silicon check valves to direct the flow. The dynamic pressure of an amount of gas contained in a cavity, controlled by resistive heating, actuates the pump membrane. The cavity, chambers, channels and valves are realized in silicon wafers by wet chemical etching. Experimental results are presented. Maximum yield and built-up pressure equal 34 ¿l/min and 0.05 atm, at a supply voltage of 6 V. Results of simulations show good agreement with the actual dynamic behaviour of the pump