CMOS Terahertz Metamaterial Based 64 × 64 Bolometric Detector Arrays
- Escorcia Carranza, Ivonne
- Grant, James
- Gough, John
- Cumming, David R.S.
Publication date
January 2017
DOI Publisher
Institute of Electrical and Electronics Engineers (IEEE) Language
EnglishAbstract
We present two terahertz detectors composed of microbolometer sensors (vanadium oxide and silicon pn diode) and metamaterial absorbers monolithically integrated into a complementary metal oxide semiconductor (CMOS) process. The metamaterial absorbers were created using the metal-dielectric-metal layers of a commercial CMOS technology resulting in low-cost terahertz detectors. The scalability of this technology was used to form a 64 × 64 pixel terahertz focal plane array
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