IOS Press Optimization of a 3D micro-accelerometer

Abstract. Scale reduction improves the amplitude of diamagnetism. Thus diamagnetic levitation is possible at the microscale with simple micromagnets. The present work aims at comparing the performances of this levitation at the microscale with other well established technologies. A device including a levitating magnet in a diamagnetic box is optimized in order to fulfil the requirements of three different markets in the acceleration sensing field. It is shown that this technology fulfils the requirements for medium range and short time response markets. However, the use of small proof mass limits the resolution of high precision sensors