Fabrication of arrays of artificial hairs for complex flow pattern recognition

We present monolithically integrated high-density arrays of artificial hairs forflow pattern measurements based on drag force. A combined bulWsurface micromachining pro-cess has been developed to integrate the artificial hairs with capacitive read-out. First fabrication results show the possibility ta fabricate out-ofplane hairs without reverting to micro-assembly technologies. This enables realisation of high-density arrays of symmetrical sensors with two-dimensional sensitivity