The small size and integrability make the silicon micromechanical rf-resonators attractive components for future wireless communication devices. In particular, we show that using the microresonators one can construct oscillators exhibiting low phase noise and good long-term stability. Such compact solutions challenge conventional quartz crystals in frequency reference applications. 1
A micromechanical 13.1-MHz bulk acoustic mode silicon resonator having a high quality factor (Q=130 ...
We report on the development of a new microelectronic mechanical system (MEMS)-based quartz resonato...
Operation of a 14 MHz micromechanical oscillator is demonstrated and analyzed. Single-crystal silico...
The small size and integrability make the silicon micromechanical rf-resonators attractive component...
The need for miniaturized frequency-selective components in electronic systems is clear. The questi...
Series-resonant vibrating micromechanical resonator oscillators, using a custom-designed, single-sta...
The very significant growth of the wireless communication industry has spawned tremendous interest i...
This dissertation explores the performance capabilities, limitations, and theoretical analysis of mi...
We describe the use of bulk acoustic mode in micromechanical silicon resonators operating at radio f...
Micromechanical resonant devices have recently emerged as potential replacements for off-chip, discr...
Wireless communication technology has revolutionized our daily life through rapid development in the...
This dissertation explores the performance capabilities and limitations of micromechanical resonator...
Nonlinear effects in single-crystal silicon microresonators are analyzed with the focus on mechanica...
Reference oscillators are used in a wide range of electronic devices for timing and for providing th...
Within the Microelectronics Industry, the core research is focused on the realization of the Moore's...
A micromechanical 13.1-MHz bulk acoustic mode silicon resonator having a high quality factor (Q=130 ...
We report on the development of a new microelectronic mechanical system (MEMS)-based quartz resonato...
Operation of a 14 MHz micromechanical oscillator is demonstrated and analyzed. Single-crystal silico...
The small size and integrability make the silicon micromechanical rf-resonators attractive component...
The need for miniaturized frequency-selective components in electronic systems is clear. The questi...
Series-resonant vibrating micromechanical resonator oscillators, using a custom-designed, single-sta...
The very significant growth of the wireless communication industry has spawned tremendous interest i...
This dissertation explores the performance capabilities, limitations, and theoretical analysis of mi...
We describe the use of bulk acoustic mode in micromechanical silicon resonators operating at radio f...
Micromechanical resonant devices have recently emerged as potential replacements for off-chip, discr...
Wireless communication technology has revolutionized our daily life through rapid development in the...
This dissertation explores the performance capabilities and limitations of micromechanical resonator...
Nonlinear effects in single-crystal silicon microresonators are analyzed with the focus on mechanica...
Reference oscillators are used in a wide range of electronic devices for timing and for providing th...
Within the Microelectronics Industry, the core research is focused on the realization of the Moore's...
A micromechanical 13.1-MHz bulk acoustic mode silicon resonator having a high quality factor (Q=130 ...
We report on the development of a new microelectronic mechanical system (MEMS)-based quartz resonato...
Operation of a 14 MHz micromechanical oscillator is demonstrated and analyzed. Single-crystal silico...