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Thermoelectric materials have great potential for a range of energy harvesting applications. The thermoelectric performance of Ge/SiGe heterostructures is presented with the aim of developing materials to be used as power sources for autonomous sensing applications. Seebeck coefficients up to 279.5 ± 1.2 µV/K with electrical conductivities of 77,200 S/m are demonstrated at room temperature with power factors of 6.02 ± 0.05 mW m –1