Stability of multi-component epilayers and nanopattern formation

assembly, surface stress A uniform multi-component epilayer may lose stability under the combined action of spinodal decom-position and epilayer–substrate interaction, separating into multiple phases. The phases may further self-organize into regular patterns. This paper investigates the compositional stability of a ternary epliayer and the subsequent emergence of nanoscale patterns. Multiple energetic forces and kinetic processes involving phase separation, phase coarsening and phase refining are incorporated into a continuous phase field model. Linear stability analysis is performed by perturbing a uniform concentration field into a sinusoidal field with small amplitude and arbitrary wavelength. The analysis shows that the epilayer–substrate interaction counteracts the coarsening effect of phase boundary energy and may lead to the formation of steady nanoscale patterns. Detailed analysis also reveals the interaction of multi-phases and its effect on the stability condition. Numerical simulation of evolving concentration field is discussed at the end of the paper. The simulations show that the pattern formation process of multi-component epilayers involves remarkably rich dynamics