UDK 548.734.3: 539.216 A Nanoindentation Study of Magnetron Co-Sputtered Nanocrystalline Ternary Nitride Coatings

Nanoindentation testing was used to determine the hardness, elastic modulus and plasticity parameter of three newly developed ternary nitride coatings with nano-sized grains. With decreasing nitrogen deposition pressure, grain diameter of the coatings decreases that leads to both higher nanohardness and elastic modulus with conservation of satisfactory values of plasticity characteristic