ANGULAR RATE SENSORS BASED ON THE MEMS RING

Principles of construction of a micromechanical angular-rate sensor on the basis of the wave solid-state gyro with the ring resonator and positional excitation are observed. The special attention is given to implementation of augmented autogenerating excitation of the resonator, implementation of a compensating principle of the measurement, specific inaccuracies of the sensor, to the arrangements supplying linearity of transformation of measured angular rate. The derived estimations of the basic informational parameters of the sensor determine its primary application for a high dynamic vehicles demanding measurement of large angular rates, a small time of its readiness, wide bandwidth of the sensor. Key words Sensor, micromechanics, angular rate, solid-state, ring