Study of Viscoelastic Effect on the Frequency Shift of Microcantilever Chemical Sensors

Microcantilevers coated with a chemically sensitive layer are increasingly being used in chemical detection systems. The sensitive coating, often a polymer, absorbs specific molecules, which can be detected by monitoring the shift in the mechanical resonant frequency. Usually, the frequency shift resulting from molecular absorption is interpreted as a mass loading effect. However, mass loading is not the only effect that has an impact on the frequency shift; the viscoelastic properties of the sensitive coating are also affected by the sorption process. Sorption-induced modulus changes are typically difficult to characterize. However, it is known that the sorption of analyte molecules in a polymer coating results in the plasticization of the coating. In most cases, the polymer becomes more rubbery with increasing concentration of analyte molecules, i.e., the coating becomes softer with increasing loss modulus while th