A Robust Controller for the Manipulation of Micro- Scale Objects

Abstract—A suite of novel robust controllers is presented for the manipulation and handling of micro-scale objects in a micro-electromechanical system (MEMS) where adhesive, surface tension, friction and van der Waals forces are dominant. Moreover, these forces are typically unknown. The robust controller overcomes the unknown system dynamics and ensures the performance in the presence of actuator constraints by assuming that the upper bounds on these forces are known. On the other hand, for the robust adaptive controller, the unknown forces are estimated online. Using the Lyapunov approach, the uniformly ultimate boundedness (UUB) of the closed-loop manipulation error is shown for pick and place tasks. Simulation results are presented to substantiate the theoretical conclusions. I