Design and Implementation of a New 3-DOF Electro- magnetic Micropositioner Utilizing Flexure Mechanism

In this paper, a novel, compact and three de-gree-of-freedoms (DOFs) micropositioner with large travel ranges is presented. The design of the micropositioner util-izes the monolithic parallel flexure mechanism with the built-in electromagnetic actuators and uses the optical sen-sors to achieve the object of 3-DOF precise motion. An adaptive sliding-mode controller is proposed to let the sys-tem is more robust and stable in positioning. The developed robust control architecture consists of three components: 1) sliding mode controller, 2) adaptive law, and 3) force allo-cation. From the provided experimental results, satisfactory performances of the hereby developed system, including stiffness and precision, have been successfully demon-strated