Key Words

dynamics E CFD E Contamination control The particle-free conditions provided by cleanrooms are essential for many modern manufacturing indus-tries. Cleanrooms have to be first designed, con-structed, and then on-site tested to ensure they achieve their performance specification. The on-site testing needs to be continued repeatedly even at the fully operational stage. In this study, field-testing of cleanrooms looking at parameters such as: airborne particle counts, airflow volume, turbulence intensity, temperature and pressure difference, were carried out under different occupational states in a newly con-structed cleanroom. It was found that improved con-tamination control was needed due to the high particle counts at specific sampling locations. Consequently, a computational fluid dynamics simulation was con-ducted to investigate airflow characteristics based on the existing field-test results. Improvement strategies with less expenditure were proposed and have been assessed comprehensively. The results from computer simulation showed that an improvement of airflow could be achieved, not only by increasing the number of fan-filter units, but also by better arrangement of the return air grilles at both sides of the cleanroom