PROCEEDINGS OF THE INTERNATIONAL CONFERENCE NANOMATERIALS: APPLICATIONS AND PROPERTIES

The magnetron sputtered coatings on base AlN-TiB2(TiSi2) were investigated in this paper. The ele-ment composition, structural-phase composition, morphology and mechanical properties were investigated before and after annealing of coatings under 1350 C. The concentration of elements in the coating were changed after annealing under 900 C and further annealing under 1350 C (especially after annealing under 1350 C).The hardness of as-deposited coatings was 15 GPa, but after the annealing under 1350 C the value of hardness was increased up to (22 23.5) GPa. The value of the index viscoplastic was 0,07. The amorphous like structure and high damping properties of the AlN-TiB2(TiSi2) coating makes promising the use of these coatings as a contacting layer in multilayer wear resistant coatings, and as diffusion barriers in the form of independent elements