Abstract—To compensate for changes in ambient temperature, thermal flow sensors are usually heated to a constant temperature above ambient temperature. This operating mode, however, requires an extra ambient-temperature sensor. Using a simple model, it is shown that for a two-dimensional thermal flow sensor, similar compensation may be obtained by using a constant heating power, thus eliminating the need for an ambient-temperature sensor. The flow sensor’s interface circuitry consists of two thermal sigma–delta modulators that heat the sensor with con-stant power and dynamically cancel the flow-induced temperature gradient. The modulator’s bit-stream outputs are then a digital representation of the heat distribution in the sensor. Wind tunn...
A thermal flow sensor has been realised consisting of freely-suspended silicon-rich silicon-nitride ...
In this work we have designed and simulated a thermal bi-directional integrated circuit mass flow se...
The research question that is addressed in this paper relates to the performance limitations of ther...
We present a thermal flow sensor designed for measuring air as well as water flow velocities in heat...
© 2002 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for a...
This paper presents a unified theory for different measurement concepts of a thermal flow sensor. Ba...
© 2002 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for a...
Wind sensors are widely used in many critical applications, such as navigation, weather forecast, ae...
PWM control of the heated element in constant temperature difference mode was designed and tested fo...
A thermal mass flow sensor with high dynamic flow range in silicon bulk micromachining membrane tech...
In this paper we propose a new anemometer principle. Next to the known Constant Power Anemometry (CP...
This paper demonstrates a novel flow sensor with two-dimensional 360° direction sensitivity achieved...
A simple silicon two-dimensional (2D) flow sensor for the measurement of both flow direction and spe...
Wind sensors are widely used in many critical applications, such as navigation, weather forecast, ae...
Abstract: Miniaturized flow sensors composed of a thin membrane supporting appropriately positioned ...
A thermal flow sensor has been realised consisting of freely-suspended silicon-rich silicon-nitride ...
In this work we have designed and simulated a thermal bi-directional integrated circuit mass flow se...
The research question that is addressed in this paper relates to the performance limitations of ther...
We present a thermal flow sensor designed for measuring air as well as water flow velocities in heat...
© 2002 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for a...
This paper presents a unified theory for different measurement concepts of a thermal flow sensor. Ba...
© 2002 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for a...
Wind sensors are widely used in many critical applications, such as navigation, weather forecast, ae...
PWM control of the heated element in constant temperature difference mode was designed and tested fo...
A thermal mass flow sensor with high dynamic flow range in silicon bulk micromachining membrane tech...
In this paper we propose a new anemometer principle. Next to the known Constant Power Anemometry (CP...
This paper demonstrates a novel flow sensor with two-dimensional 360° direction sensitivity achieved...
A simple silicon two-dimensional (2D) flow sensor for the measurement of both flow direction and spe...
Wind sensors are widely used in many critical applications, such as navigation, weather forecast, ae...
Abstract: Miniaturized flow sensors composed of a thin membrane supporting appropriately positioned ...
A thermal flow sensor has been realised consisting of freely-suspended silicon-rich silicon-nitride ...
In this work we have designed and simulated a thermal bi-directional integrated circuit mass flow se...
The research question that is addressed in this paper relates to the performance limitations of ther...