Error-Free Matthiessen's Rule in the MOSFET Universal Mobility Region

Abstract—Through the experimentally validated inversion-layer mobility simulation, we devise an error-free version of Matthiessen’s rule for a single-gate n-channel bulk MOSFET in the universal mobility region. The core of the new rule lies in a semi-empirical model, which explicitly expresses the errors due to the conventional use of Matthiessen’s rule as a function of both the lowest subband population and the relative strength of individual mobility components. The model holds under practical conditions (with temperatures up to 400 K) and in a broad range of substrate doping concentrations (1014 to 1018 cm−3). To make the error-free proposal more general, we elaborate on several issues, including strain, impurity Coulomb scattering, and remote scattering. The thin-film case can be treated accordingly. Index Terms—Matthiessen’s rule, metal–oxide–semiconductor field-effect transistors (MOSFETs), mobility, model, scattering