P48 ECS Solid State Letters, 1 (3) P48-P50 (2012) 2162-8742/2012/1(3)/P48/3/$28.00 © The Electrochemical Society Double-Pattern Textured ZnO:Ga Thin Films Fabricated by an APPJ and an DC Sputtering Shu-Hung Yu,a,z Po-Ching Ho,a, ∗ Teng-Wei Yang,a Chien-Ch

Here, double-pattern textured gallium doped zinc oxide (GZO) films were achieved by inserting organosilicon underlayers deposited from an atmospheric pressure plasma jet (APPJ) between sputtered GZO films and glass substrates. The electro-optical characteristics of the textured GZO films were controlled by the haze of organosilicon underlayers. All GZO films were thermally annealed in high vacuum to improve film quality. Post-annealed textured GZO films exhibited an average optical transmittance of about 80 % in a wide range. Hall measurements showed Hall mobility above 26 cm2/V-s, carrier concentration around 2.4×1020 cm−3 and resistivity below 9.91×10−4 -cm