Add to ORKGAbstract—With the use of silicon micromachining, an inorganic membrane sieve for microfiltration has been constructed having a silicon nitride membrane layer with thickness typically 1 m and perforations typically between 0.5 m and 10 m in diameter. As a support a h100i-silicon wafer with openings of 1000 m in diameter has been used. The thin silicon nitride layer is deposited on an initially dense support by means of a suitable chemical vapor deposition method (LPCVD). Perforations in the membrane layer are obtained with use of standard photo lithography and reactive ion etching (RIE). The deflection and maximum load of the membrane sieves are calculated in a first approximation. Experiments to measure the maximum load of silicon-rich sili...
Surface micromachined membranes such as RF-MEMS switches are widely adopted in the field of telecomm...
A process to fabricate functional polysilicon structures above large (4 x 4 mm(2)) thin (200 nm), ve...
This work concerns evaluation by permeation measurements and modeling of thin (<2µm) MFI molecular s...
With the use of silicon micromachining, an inorganic membrane sieve for microfiltration has been con...
A microsieve with a very uniform pore size of 260 nm and a pore to pore spacing of 510 nm has been f...
In this paper, we report a uniform microtrench array fabricated on silicon substrate. The proposed s...
Inorganic microfiltration membranes with a pore size down to 0.1 µm have been made using laser inter...
Semi-Permeable silicon nitride membranes have been developed using a Bosch etch process followed by ...
Inorganic microfiltration membranes with a pore size down to 0.1 mm have been made using laser inter...
A new micromachining method to fabricate wafer scale, atomically smooth nano-membranes is described....
Abstract ⎯ A new micromachining method to fabricate wafer scale, atomically smooth nano-membranes is...
In this paper, we report a uniform microtrench array fabricated on silicon substrate. The proposed s...
Square-form, multi-layered nanofilter membranes have been investigated experimentally and by numeric...
An array of very uniform cylindrical nanopores with a pore diameter as small as 25 nm has been fabri...
Microsieves are a fairly recent (1994) innovation in membrane-filtration technology, especially at t...
Surface micromachined membranes such as RF-MEMS switches are widely adopted in the field of telecomm...
A process to fabricate functional polysilicon structures above large (4 x 4 mm(2)) thin (200 nm), ve...
This work concerns evaluation by permeation measurements and modeling of thin (<2µm) MFI molecular s...
With the use of silicon micromachining, an inorganic membrane sieve for microfiltration has been con...
A microsieve with a very uniform pore size of 260 nm and a pore to pore spacing of 510 nm has been f...
In this paper, we report a uniform microtrench array fabricated on silicon substrate. The proposed s...
Inorganic microfiltration membranes with a pore size down to 0.1 µm have been made using laser inter...
Semi-Permeable silicon nitride membranes have been developed using a Bosch etch process followed by ...
Inorganic microfiltration membranes with a pore size down to 0.1 mm have been made using laser inter...
A new micromachining method to fabricate wafer scale, atomically smooth nano-membranes is described....
Abstract ⎯ A new micromachining method to fabricate wafer scale, atomically smooth nano-membranes is...
In this paper, we report a uniform microtrench array fabricated on silicon substrate. The proposed s...
Square-form, multi-layered nanofilter membranes have been investigated experimentally and by numeric...
An array of very uniform cylindrical nanopores with a pore diameter as small as 25 nm has been fabri...
Microsieves are a fairly recent (1994) innovation in membrane-filtration technology, especially at t...
Surface micromachined membranes such as RF-MEMS switches are widely adopted in the field of telecomm...
A process to fabricate functional polysilicon structures above large (4 x 4 mm(2)) thin (200 nm), ve...
This work concerns evaluation by permeation measurements and modeling of thin (<2µm) MFI molecular s...