Shanghai 200050,China

Abstract: A novel method for preparing PZT thick films has been developed, which integrated some advantages of common-used processes. Comparing with conventional methods, the present technology can prevent cracks, improve morphologies and properties in films, and increase an achievable thickness. The films show a dense structure and therefor uniform properties, that are comparable with those in bulk ceramics. PZT film of 3Spm thickness has a large remanent polarization of 44pC/cm2, small coercive field of 50 kV/cm, large dielectric constant of 2000 and small dielectric loss tan6 of 0.04, respectively. Key words: PZT; thick film; alkoxide; hydrolytic produc