Abstract — Self-assembled DNA nanostructures promise low-cost ways to create nanoscale shapes. DNA nanostructures can also be used to position particles with nanometer precision. Yet, reliable and low-cost ways of integrating the structures with MEMS technology still have to be developed and innovations are of great interest to the field. We have examined in detail the adherence of DNA origami tiles on silicon oxide surfaces of wafers in dependence on pH-value and magnesium ion concentration. The results of this work will help to pursue new strategies of positioning DNA nanostruc-tures on SiO2. Precise control over the strength of structure-surface adhesion is a prerequisite of relia-ble processes